Legacy Etch and Spin Clean Products
There are a number of semiconductor applications today that do not require advanced wafer |
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| Reliant™ Systems Business Lam's refurbished and new legacy products are offered through our Reliant Systems Business to meet semiconductor manufacturers’ needs for high-performance, low-risk equipment. With a large installed base, Lam’s standalone single-chamber, Alliance®, and 2300®-based etch systems and single-wafer spin clean products have served many device generations, demonstrating their robust production capability. Refurbished systems are built by Lam-certified personnel to original specifications using OEM-certified parts to ensure the highest quality product and reliable performance. This thorough approach to systems refurbishment includes testing protocols that are identical to those used on new products. Parts and labor, provided by a dedicated local support team, are included for 90 days, and system performance is guaranteed. Offering fully-tested refurbished systems, remanufacturing services, and newly-built Alliance etch and spin clean products, the Reliant Systems Business provides a supply of even the most difficult to find Lam Research legacy equipment. |
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For legacy Novellus products (deposition, photoresist strip, CMP) please click here. |

