Milestones

2004	Launched 2300 Versys® Kiyo™ silicon etch system extending advanced tuning capabilityes for 65nm
2003	Demonstrated extendibility to sub—65 nm for critical front— and backend processes on 2300 Exelan ® Flex™ dielectric etch system Achieved ISO 14001 environmental management system registration
2002	Launched 2300 Versys® Star™ silicon etch system for sub—90—nm applications Released MyLam.com®, a new extranet web site for customers that provides immediate access to the latest technical information and documentation online
2001	Introduced the TCP® 9600DFM metal etch system for sub—150nm processes Shipped 1,000th post—CMP clean system to Philips Achieved ISO 9001:2000 Quality System registration; scope includes design, manufacture, installation, and servicing of semiconductor wafer fabrication process equipment
2000	Shipped 2,000th high—density TCP™ etch chamber Launched 2300™ Etch Series, offering 200mm and 300mm capability
1999	Shipped 100th Synergy Integra™ integrated CMP cleaning system Introduced next—generation Exelan® dielectric etch system employing Dual Frequency Confined™ (DFC™) plasma source technology
1998	Appointed Jim Bagley chairman of the board Introduced first CMP system employing proprietary Linear Planarization Technology™ design Appointed Steve Newberry executive vice president and chief operating officer
1997	Appointed Jim Bagley chief executive officer Acquired OnTrak Systems, Inc.
1996	Shipped 500th TCP™ Etch Series chamber Introduced improved DFC technology, 4520XLE dielectric etch system
1995	Introduced first product incorporating DFC technology, 4520XL dielectric etch system Achieved 0.25 micron process capabilities in all served markets
1994	Opened R&D center at Fremont, Calif. campus Shipped 1,000th Rainbow™ Series System
1993	Opened process development center in Japan Introduced Alliance® cluster tool platform
1992	Introduced first Transformer Coupled Plasma™ source technology based products, the TCP® 9400 for silicon etch and the TCP® 9600 for metal etch
1990	Established presence in China
1987	Relocated to new headquarters on Cushing Parkway in Fremont Introduced Rainbow 4400 Etch Series (successor to AutoEtch) for polysilicon etch
1985	Established a global presence: Asia and Europe Introduced first oxide etch system, the AutoEtch® 590
1984	Achieved IPO and listing on Nasdaq
1981	Introduced first product, the AutoEtch® 480, for polysilicon etch
1980	Founded by David K. Lam