Lam Research is dedicated to the success of our customers by being the world-class provider of innovative productivity solutions to the semiconductor industry.  As the leading plasma etch supplier and a leading provider of single-wafer wet processing systems, we at Lam Research
are committed to delivering robust solutions through our product offerings and expert
customer support.

Plasma etch processes, one of the most critical steps of semiconductor device manufacturing,
are used to create the finely delineated features in conductive and dielectric layers.  Wafer
cleaning steps are performed to remove residues and particles after etch or photoresist strip or
to prepare a wafer surface for subsequent processing steps and are vital for protecting and
enhancing device yield.

With each new technology node, additional requirements and challenges drive the need for
advanced manufacturing solutions.  Lam Research strives to consistently deliver these advanced
capabilities with cost-effective production performance.  We understand the close relationship between customer trust and the timely delivery of new solutions that leads to shared success with
our customers.

Lam’s leading etch products address a broad range of applications, from conductor etch
and dielectric etch to emerging micro-electromechanical systems and deep silicon
(MEMS & Deep Si) and three-dimensional integrated circuit (3-D IC) applications.  Lam’s
single-wafer clean products include both wet and plasma-based technologies, allowing chipmakers to implement customized yield-enhancing solutions.  Our 2300^® series software applications are designed to maximize equipment capability.  To meet varying levels of customer needs, we also offer refurbished and newly-built legacy products.  With this broad product portfolio and combined expertise, Lam Research is addressing some of the toughest semiconductor processing challenges.