Etch Training Courses

Lam SpectraAnalyzer
Course Number: 402-240350-242

Course Objectives:

The objective of this course is to provide the student with the basic understanding of how to operate Lam SpectraAnalyzer.

Course Description:

This Technical Training Course provides an introduction to the basic features of Lam SpectraAnalyzer. The principle techniques for working with the different data file types as well as filter selection are covered. The application of various algorithms is not handled in this course (see Basic Endpoint Technology).

Target Audience:

This course is designed for equipment and process engineers who desire to learn how to use the Lam SpectraAnalyzer software.

Benefits for
Class Participants:

  • Understand how to examine IB Datalog files, structure variations in Basis Functions and see modifications in endpoint performance.
  • Understand how to examine History files, structure variations in Basis Functions and see modifications in endpoint performance, as well as saving new files.
  • Understand the option for examining Snapshot files and using SpectraMath Learn the techniques for exploring filter performance.
Agenda:

Day 1:

  • Introduction, purpose and capabilities
  • Review of Spectroscopy and data collection
  • IBDatalog file application and exercises
  • History file application and exercises
  • Snapshot file application and .exe
Prerequisites:

There are no prerequisites for this course

Schedule:

If you are interested in this course, please contact us for the latest schedule and availability.

Notes:

Schedule and prices subject to change without notice. Please confirm with Lam.