The objective of this course is to provide the student with the basic understanding of how to operate Lam DataAnalyzer™ and Lam SpectraAnalyzer™ software programs.

This Technical Training Course provides an introduction to the basic features of the Lam DataAnalyzer and Lam SpectraAnalyzer Software programs. The principle techniques of trace plotting, trend charting and generation of a baseline are covered. Also reviewed are files from other various applications, such as Lam AutoPM TM and Dynamic Alignment. For Lam SpectraAnalyzer, the principle techniques for working with the different data file types as well as filter selection are covered. The application of various algorithms is not handled in this course (see Basic Endpoint Technology).

This course is designed for equipment and process engineers who desire to learn how to use the Lam DataAnalyzer and Lam SpectraAnalyzer software.

• Understand the option for examining large data sets while examining the data in the full analog view.
• Learn the techniques for building a statistical model of good process /hardware performance by creating baseline files.
• Understand how to examine IB Datalog files, structure variations in Basis Functions and see modifications in endpoint performance.
• Understand how to examine History files, structure variations in Basis Functions and see modifications in endpoint performance.
• Understand the option for examining Snapshot files and using SpectraMath. Learn the techniques for exploring filter performance.

Day 1: Lam DataAnalyzer

• Introduction, purpose & capabilities
• Plotting parameter trace data
• Concatenation & trend data plotting
• Construction baselines & SPC review
• Overview of diagnostics & troubleshooting

Day 2: Lam SpectralAnalyzer

• Introduction, purpose and capabilities
• Review of Spectroscopy and data collection
• IBDatalog file application and exercises
• History file application and exercises
• Snapshot file application  and .exe

There are no prerequisites for taking this course.

If you are interested in this course, please contact us for the latest schedule and availability.

Schedule and prices subject to change without notice. Please confirm with Lam.