The objective of this course is to provide the student with the ability to use the Lam Chamber Matching procedure, beginning with auditing the tools and continuing through setting up and testing process fine tuning.

This course strives to capture and explain the chamber matching process as developed by the dielectric and conductor etch product groups. It is organized into four basic sections:

• Overview: Preliminary Auditing and Problem Definition
• Tools for Hardware Analysis
• Tools for Process Analysis
• Characterizing and matching chambers

This course is designed for equipment and process engineers who desire to learn how to carry out chamber matching of Lam’s etch equipment.

Enable the student to perform the following tasks:

• Define a problem statement confirming the existence of a chamber matching problem.
• Carry out process, hardware and software audits of the chambers, confirming that all possible chamber differences have been eliminated.
• Correct obvious hardware and process problems that will make chamber matching ineffective or useless.
  

Day 1:

• Chamber Matching Overview
• Tools for Hardware Analysis

Day 2:

• Tools for Process Analysis
• Chamber Matching Procedure

The prerequisite for this course is Statistics for Engineers.

If you are interested in this course, please contact us for the latest schedule and availability.

Schedule and prices subject to change without notice. Please confirm with Lam.