Etch Training Courses

Defect Management
Course Number: 402-240350-262

Course Objectives:

The objectives of this course are to provide the student with sufficient background in the fundamental concepts of defect management on Lam Research Corporation’s dielectric and conductor etch systems. Upon completing this course, the student should be able to understand the way defects and metal contamination are measured and reported. The student will also gain an understanding of common sources of defects and metal contamination and how to identify and minimize these through numerous case studies presented in class.

Course Description:

This Process Training Course provides a treatment of defect management. Included are: theory and measurement, common solutions and case studies for dielectric and conductor etch systems and troubleshooting BKM.

Target Audience:

This course is designed for equipment and process engineers who desire an in depth knowledge of Defect Management.
Benefits for
Class Participants:
  • Theory section gives understanding of forces on particles in a plasma. How the balance of these forces and chamber design are used to control defect levels. Demonstrations are presented that show how existing BKMs are applied.
  • Measurement section gives an overview of how particles and defects are measured, also how metal contamination is measured and reported. Understanding these concepts will facilitate data analysis and interpretation.
  • Several case studies based on actual defect data and solutions are reviewed for both conductor and dielectric etch systems. By reviewing these studies, students gain background material that can assist in finding solutions to future particle excursions.
  • Troubleshooting section presents BKM information for particle and metal contamination troubleshooting. Also, understanding the procedures and communicating this data to support groups can assist in more timely solutions to defect and metal contamination escalations.
Daily
Agenda:

Day 1:

  • Defects vs Particles
  • Measurement Systems
  • Case Studies-Dielectric

Day 2:

  • Case Studies-Conductor
  • Troubleshooting BKM
Prerequisites:

There are no prerequisites for this course
Schedule:

If you are interested in this course, please contact us for the latest schedule and availability.
Notes:

Schedule and prices subject to change without notice. Please confirm with Lam.