Etch Training Courses

LAM Endpoint Technology
Course Number: 402-240350-813

Course Objectives:

This objective of this course is to provide the student with the basics of process endpoints and the knowledge of how to make them reliable.

Course Description:

This Technical Training Course provides a basic overview of the generation of process endpoints, the techniques for their construction, and an understanding of how to make them reliable.

Target Audience:

This course is designed for equipment and process engineers who desire to learn about endpoint techniques and their basic elements.

Benefits for
Class Participants:

  • Obtain an adequate background of the foundational concepts to understand the basis on which the signals, hardware, and algorithms do their job.
  • Ability to understand the specific operational choices applying to various signal conditioning and algorithm selections, and some understanding of when to apply those choices.
  • Ability to distinguish between hardware and process circumstances which create marginal endpoint performances along with approaches to reduce the impact of these issues for more reliable endpoint schemes.
Agenda:

Day 1:

  • Basic Endpoint Techniques for OES and IEP and supporting labs
  • Techniques for construction of Basis Functions and supporting labs
  • Endpoint algorithms and parameter choices and supporting labs
  • Noise considerations
Prerequisites:

The Lam Spectral Analyzer class is a prerequisite for taking this course.

Schedule:

If you are interested in this course, please contact us for the latest schedule and availability.

Notes:

Schedule and prices subject to change without notice. Please confirm with Lam.